Mitutoyo TM-500 Series Bedienungsanleitung PDF herunterladen (Seite 11)

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MICROSCOPES

Hyper MF/MF-U

SERIES 176 — High-magnification Measuring Microscopes

FEATURES

• The world highest accuracy

XY measuring accuracy of (0.9+3L/1000)µm

0.01µm resolution

• High operationality and repeatability

Three axes motorized control

Power-drive auto focus unit is a standard feature.

Model Hyper MF Hyper MF-U

Order No. 176-401 176-402

Measuring range 250 x 150 x 150mm (X x Y x Z) 250 x 150 x 150mm (X x Y x Z)

Resolution 0.01µm 0.01µm

Optical tube — Bright field, Bright field LAF,

Bright field/Dark field, Bright field/Darkfield (LAF)

Reticle Chain line cross hairs (line width: 5µm) Chain line cross hairs (line width: 5µm)

Pupil distance adjustment Siedentopf type, adjustment range: 51 to 76mm Siedentopf type, adjustment range: 51 to 76mm

Optical path switching Observation / TV camera=50/50 Observation / TV camera=50/50

Accuraccy X, Y-axis:(0.9+3L/1000)µm L = Measuring length X, Y-axis:(0.9+3L/1000)µm L = Measuring length

Z-axis:(1.5+10L/1000)µm L = Measuring length Z-axis:(1.5+10L/1000)µm L = Measuring length

Drive system Power-drive Power-drive

Maximum load 30kg 30kg

Illumination 12V, 50W fiber optics illumination 12V, 50W fiber optics illumination

built-in aperture diaphragm built-in aperture diaphragm

Objective 1, 3, 5, 10, 20, 50, 100X 1, 2, 5, 10, 20, 50, 100X

Eyepiece 10, 15, 20X 10, 15, 20X

Observation Bright Field Bright / Dark field

Dimension 880 x 913 x 730mm 880 x 913 x 770mm

Battery AC 100, 110, 120, 220, 230, 240V AC 100, 110, 120, 220, 230, 240V

50/60Hz 50/60Hz

Maximum consumpsion 700W Maximum consumpsion 700W

Mass 250kg 255kg

1 2 ... 6 7 8 9 10 11 12 13 14 15 16 ... 35 36

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Mitutoyo TM-500 Series Bedienungsanleitung Seite 11