Mitutoyo TM-500 Series Bedienungsanleitung PDF herunterladen (Seite 17)

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VMU-V

VMU

SERIES 378 — Video Microscope Unit

Selection Guide to System Conﬁguration

Order No.

(Dependsoneachsystem

conguration)

378-505

378-506

378-513

378-514

VerticalCCDcameramount

l l l

HorizontalCCDcameramount

l

YAGlasermount

l l

Fiber-opticilluminationunit

l l

MPlanApo,MPlanApoSL,GPlanApo

objectivesforbrighteldobservation

s s s s

MPlanApoNIR,LCDPlanApoNIR,MPlan

ApoNUVandLCDPlanApoNUVobjectives

forlasercutting

s

MPlanUVobjectivesforlasermachining

s

l:Provided,s:Availableasoptionalaccessory

TheVMUisacompact,lightweight,and

easy-to-installmicroscopeunitforCCD

cameramonitoringinsemiconductor

fabricationfacilities.

SPECIFICATIONS

Maginicationoftube 1X

Applicable

wavelength

378-505,

378-506

Near-infraredandvisibleradiation

378-513 Near-infrared—visible—

near-ultravioletradiation

378-514 Visibleandultravioletradiation

Objective (Optional)

Reectedillumination •Telecentricsystemwithaperture

stopsystem

•Fiber-opticilluminator(optional)

isrequired.

Lightsource Halogenbulb(21V,150W)

(optional)

Mass 378-505:570g

378-506:590g

378-513:1270g

378-514:1300g

FEATURES

•Theopticalsystemfeaturesultra-

longworkingdistanceobjectivesand

correctionforthewiderangeofradiation

wavelengthsinuse.

•Theber-opticreectedillumination

keepstheworkpiecefreefromthermal

expansion.Theber-opticilluminatoris

requiredforthelightsource.

•Alsoavailablewithalasermountorturret

(objectivemount).

VMU-H

VMU-LB VMU-L4B

RefertotheMicroscopeUnitsleaet(E4191)

formoredetails.

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